INFORMATIVITY AS METROLOGICAL CHARACTERISTICS AT DESIGN OF SENSITIVE ELEMENT OF MEMS ACCELEROMETERS
نویسندگان
چکیده
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ژورنال
عنوان ژورنال: Bulletin of Kyiv Polytechnic Institute. Series Instrument Making
سال: 2017
ISSN: 2663-3450,0321-2211
DOI: 10.20535/1970.54(2).2017.119567